Determination of thermally induced effects and design guidelines of optomechanical accelerometers

Thermal effects, including thermally induced deformation and warm up time, are ubiquitous problems for sensors, especially for inertial measurement units such as accelerometers. Optomechanical accelerometers, which contain light sources that can be regarded as heat sources, involve a different thermal phenomenon in terms of their specific optical readout, and the phenomenon has not been investigated systematically. This paper proposes a model to evaluate the temperature difference, rise time and thermally induced deformation of optomechanical accelerometers, and then constructs design guidelines which can diminish these thermal effects without compromising other mechanical performances, based on the analysis of the interplay of thermal and mechanical performances. In the model, the irradiation of the micromachined structure of a laser source is considered a dominant factor. The experimental data obtained using a prototype of an optomechanical accelerometer approximately confirm the validity of the model for the rise time and response tendency. Moreover, design guidelines that adopt suspensions with a flat cross-section and a short length are demonstrated with reference to the analysis. The guidelines can reduce the thermally induced deformation and rise time or achieve higher mechanical performances with similar thermal effects, which paves the way for the design of temperature-tolerant and robust, high-performance devices.